JPH0195604U - - Google Patents
Info
- Publication number
- JPH0195604U JPH0195604U JP19131787U JP19131787U JPH0195604U JP H0195604 U JPH0195604 U JP H0195604U JP 19131787 U JP19131787 U JP 19131787U JP 19131787 U JP19131787 U JP 19131787U JP H0195604 U JPH0195604 U JP H0195604U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- interference method
- measuring
- fringe scanning
- surface shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010008 shearing Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19131787U JPH0195604U (en]) | 1987-12-18 | 1987-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19131787U JPH0195604U (en]) | 1987-12-18 | 1987-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195604U true JPH0195604U (en]) | 1989-06-23 |
Family
ID=31482236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19131787U Pending JPH0195604U (en]) | 1987-12-18 | 1987-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195604U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107139A (ja) * | 2009-11-20 | 2011-06-02 | Mitsutoyo Corp | 物体表面の形状測定装置、その形状測定方法及び部品キット |
-
1987
- 1987-12-18 JP JP19131787U patent/JPH0195604U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107139A (ja) * | 2009-11-20 | 2011-06-02 | Mitsutoyo Corp | 物体表面の形状測定装置、その形状測定方法及び部品キット |
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